Piezoelectric MEMS Resonators, Softcover reprint of the original 1st ed. 2017 Microsystems and Nanosystems Series
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.
Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators
Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators
Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs
Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation
Includes supplementary material: sn.pub/extras
Date de parution : 07-2018
Ouvrage de 424 p.
15.5x23.5 cm
Date de parution : 01-2017
Ouvrage de 424 p.
15.5x23.5 cm