Multilayer Integrated Film Bulk Acoustic Resonators, 2013
Auteurs : Zhang Yafei, Chen Da
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education?s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang?s research group.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology. He received his PhD in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and processing of carbon nanotubes, Si nanowires and SiC nanowhiskers, and nanodevices. He has 50 patents and has published 3 books and over 260 papers. He received the National Natural Science Award of China in 2005, and has held more than 20 invited talks at international conferences or institutions. He has also served on the organizing committee for 2 Journals.
Dr. Da Chen was a Ph.D. student in Prof. Yafei Zhang’s research group.
The basic theory and design principles of Film Bulk Acoustic Resonators (FBARs)
An overview of FBAR filters by covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films
A practical guidance on integrating BAW filters in RF systems and advanced sensor arrays
Date de parution : 09-2014
Ouvrage de 154 p.
15.5x23.5 cm
Disponible chez l'éditeur (délai d'approvisionnement : 15 jours).
Prix indicatif 105,49 €
Ajouter au panierDate de parution : 08-2012
Ouvrage de 154 p.
15.5x23.5 cm
Disponible chez l'éditeur (délai d'approvisionnement : 15 jours).
Prix indicatif 105,49 €
Ajouter au panier