Micro Process Engineering Fundamentals, Devices, Fabrication, and Applications

This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.
Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.

The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.
The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.

PREFACE

PROCESS ENGINEERING METHODS AND MICROSYSTEM TECHNOLOGY

MOMENTUM AND HEAT TRANSFER IN MICROSIZED DEVICES

TRANSPORT PROCESSES AND EXCHANGE EQUIPMENT

MULTIPHASE FLOW, EVAPORATION, AND CONDENSATION AT THE MICROSCALE

GENERATION AND MULTIPHASE FLOW OF EMULSIONS IN MICROCHANNELS

CHEMICAL REACTIONS IN CONTINUOUS-FLOW MICROSTRUCTURED REACTORS

DESIGN PROCESS AND PROJECT MANAGEMENT

SIMULATION AND ANALYTICAL MODELING FOR MICROREACTOR DESIGN

INTEGRATION OF SENSORS AND PROCESS-ANALYTICAL TECHNIQUES

MICROFABRICATION IN METALS AND POLYMERS

SILICON MICROFABRICATION FOR MICROFLUIDICS

MICROFABRICATION IN CERAMICS AND GLASS

INDUSTRIAL APPLICATIONS OF MICROCHANNEL PROCESS TECHNOLOGY IN THE UNITED STATES

INDUSTRIAL APPLICATIONS IN EUROPE

INDUSTRIAL PRODUCTION PLANTS IN JAPAN AND FUTURE DEVELOPMENTS

LABORATORY APPLICATIONS OF MICROSTRUCTURED DEVICES IN STUDENT EDUCATION

SUBJECT INDEX

Norbert Kockmann is scientific group leader at the Institute of Microsystems Engineering (IMTEK - Design of Microsystems), University
of Freiburg. After his diploma of aerospace engineering at TU Munich, he joined in 1991 Bremen University, Chair of Technical Themodynamics, Heat and Mass Transfer. After finishing his PhD work on fouling in heat exchangers in 1996, he worked as a project manager at Messer Griesheim GmbH for the plant engineer-ing of air separation units and a syngas plant. His research interests include the design, fabrication, and experimental characterization of micro-structured devices as well as the fundamental processes in microsystems.