Semiconductor process reliability in practice

A comprehensive reference on process reliability for semiconductor process and design engineers. Featuring detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing, Semiconductor Process Reliability in Practice contains numerous practical examples and discusses verifying test structures and underlying physics and theory. With continuous scaling down of semiconductor technology, process reliability has become one of the key factors limiting further scaling down, therefore, emerging reliability challenges as technology evolves make this book a timely, essential resource.