MEMS mechanical sensors

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Introduction. Materials and Fabrication Techniques. Design Tools. Packaging. Physical Sensing Techniques. Pressure Sensors. Force and Torque Sensors. Inertial Sensors. Flow Sensors for Microfluidics. Displacement Sensors.