MEMS Reliability, 2011 MEMS Reference Shelf Series

Langue : Anglais

Auteurs : Hartzell Allyson L., da Silva Mark G., Shea Herbert R.

Couverture de l’ouvrage MEMS Reliability

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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

Introduction.- Reliability /Weibull, bathtub curve, basics (What is reliability?).- Failure Modes and Physics of Failure (POF).- Strategies for identifying root cause (FMEA).- Manufacturing Processes & Procedures.- Testing & Qualification Processes & Procedures.- Improving Reliability: Techniques and Tools.- Design for Reliability (DFR).

Demonstrates how to design MEMs for reliability during the product life cycle focusing CAD methodologies and system level architecture Provides detailed information on the different types of failure modes, including but not limited to, design failures, manufacturing failures, and material failure, and how to avoid them Discusses testing, qualification, processes and procedures for MEMs reliability and the specific tests for enhancing reliability Includes supplementary material: sn.pub/extras