Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting, Softcover reprint of the original 1st ed. 2016 Springer Theses Series

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

Introduction.- Micro/nano Integrated Fabrication Technique for Silicon.- Micro/Nano Integrated Fabrication Technique for Flexible Materials.- Flexible Triboelectric Nanogenerators: Principle and Fabrication.- Flexible Triboelectric Nanogenerators: Enhancement and Applications.- Summary and Perspectives.

Dr. Zhang Xiao-Sheng is currently working as a postdoctoral researcher at École Polytechnique Fédérale de Lausanne (EPFL),
Switzerland, and as a visiting researcher at the University of Tokyo. His research interests mainly include three areas:
(1) micro/nano integrated fabrication technology;
(2) micro/nano energy technology;
(3) smart drug delivery system.

HONORS & AWARDS
• 2014 Excellent Doctoral Dissertation of Peking University
• 2014 Outstanding Graduation Student of Peking University
• 2014 Outstanding Graduation Student of Beijing City
• 2013 National Scholarship for Outstanding Graduate Students
• 2013 Academic Top 10 Graduate Student, Peking University
• 2013 Innovation Award, Peking University
• 2013 Academic Top 10 Graduate Student, School of Electronics Engineering and Computer Science, Peking University
• 2013 Best Paper Award, The 11th Annual National Academic Conference for Ph.D. Candidates
• 2012 Lu Jiaxi Outstanding Graduate Student Award, Lu Jiaxi Education Foundation (award 20 students nationwide each year)
• 2012 Tokyo Electron Limited (TEL) Scholarship, Peking University
• 2012 Founder Scholarship, Peking University
• 2011 Merit Student Award, Peking University
• 2011 Best Poster Award, 4th Intl. Conf. on Nanosci. & Tech. (ChinaNano2011), Beijing
• 2011 Best Group Award, Platinum Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea
• 2011 Best Poster Award, Silver Level, 4th Asia Nanotech Camp 2011 (ANC2011), Korea
• 2011 Best Oral Presentation, 2011 Beijing Microelectronics Forum for Ph.D. Students
• 2010 Outstanding Graduate Student Leader Award, University of Electronic Science and Technology of China
• 2003-2007 Outstanding Student Scholarship for three consecutive years & Outstanding Student Leader Award, University of Electronic Science and Technology of China

JOURNAL PUBLICATIONS
1. Xiao-Sheng Zhang, M. D. Han, R. X. Wang, F. Y. Zhu