Vistas in Nanofabrication

This book provides several examples of how diverse nanofabrication techniques are being used by researchers across the world to fabricate useful materials and devices. A number of research groups present their cutting-edge work on fabricating a variety of nanoscale structures such as split rings, wires, gaps, trenches and holes. The innovative techniques described in this book will be of interest to all who are engaged in research and development of nanofabrication technologies. The book mainly covers application areas in electronics and photonics but the techniques are general enough to be applied to other areas.

Preface. Nanosphere lithography for high-density nanopatterning. Dry etching of semiconductors at the nano and micro scale. Nanoscale split ring resonator-based metamaterials. Nanofabrication of high-performance light-emitting diodes. On-film formation of nanowires: A route to defect-free nanowire growth and device fabrication. Nanotrenches: an optical lithography process for high aspect ratio sub-100 nm gaps. High aspect ratio metallic nanostructures for transparent electrodes. Fabrication of nanogap electrodes by electroless- and electro-deposition. Nanometer-scale processing by tribological action and its potential applications. Nano-materials integration on CMOS platforms. Focused ion beam fabrication of metallic nanostructures. Naotechnology showcase.

Faiz Rahman has been an educator and researcher in the field of nanotechnology for many years. He obtained his PhD from Imperial College, London and has worked at the California Institute of Technology, Cypress Semiconductor Corporation and the University of Glasgow. Dr Rahman’s principal interests are in semiconductor materials and devices. Together with his research students and colleagues he has carried work on a number of topics that include solar cells, light-emitting diodes, advanced sensors and organic electronics. He has also widely consulted for the industry and is active with a number of professional research organisations.