Sensor Technology 2001, Softcover reprint of the original 1st ed. 2001 Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14–15 May, 2001
Langue : Anglais
Coordonnateur : Elwenspoek Miko
Proceedings of the Sensor Technology Conference 2001, Enschede, The Netherlands, 14-15 May 2001
Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection.- Electro-Osmotic Flow Control in Microfluidics Systems.- Flow Sensing Using the Temperature Distribution along a Heated Microbeam.- Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller.- Technology for Spatial Light Modulators Based on Reflective Silicon Structures.- Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor.- High Speed Integrated Cmos Wavefront Sensor.- Automotive Sensor Development: Success Guaranteed?.- Study On The Behaviour of Various Si Substrate Geometries for Use as Passive Heat Sink.- Transfer Mould Packaging For Sensors.- Inexpensive Mems Packaging.- Low-Cost System to Determine the X-Y Position in a Resistive Touch-Screen.- High Capacity Silicon Load Cells.- Thermopile Design For A Cmos Wind-Sensor.- Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon And Porous Silicon Carbide.- Limitations And Complementary Value Of Cryogenic Sf6-O2 And Bosch Plasma Etch Process For Silicon Micromachining.- Fabrication Of Mechanical Structures Using Macro-Porous Silicon.- Fine Tuning The Surface Roughness of Powder Blasted Glass Surfaces.- On the Feasibility of Using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors.- Amperometric Sensor for Detection of Redox Activity.- Accurate Quantitative Measurement of E-Field Distributions in “SOLID” Phantoms Using A Flexible Schottky Diode Sheet.- A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump.- HF Etching of Si-Oxides and Si-Nitrides for SurfaceMicromachining.- A Light Absorption Cell for ?-Tas With Koh/Ipa Etched 45° Mirrors in Silicon.- A Low-Cost And Accurate Conductance-Measurement System.- An Improved Sensor-Actuator System for Dynamic Surface Tension Measurements.- DNA Condensation Caused By Ligand Binding May Serve As A Sensor.- Forming A Rounded Convex Corner By Using Two-Step Anisotropic Koh Wet Etching.- An Accurate Measurement System for Thermopiles.- Packaged Stainless Steel Flowsensor.- Micro-Machining Of A Cryogenic Imaging Array Of Transition Edge X-Ray Microcalorimeters.- Enzyme Immobilisation Studies for Sensor Applications.- Micromachined SI-Well Scintillator Pixel Sensors for Thermal Neutron Detection.- Author Index.
Date de parution : 10-2012
Ouvrage de 200 p.
16x24 cm
Date de parution : 05-2001
Ouvrage de 200 p.
15.5x23.5 cm
Mots-clés :
CMOS; Diode; Hochfrequenz; Sensor; X-Ray; communication; glass; interferometry; machining; microsystems; optics; packaging
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