Microsystems Dynamics, 2011 Intelligent Systems, Control and Automation: Science and Engineering Series, Vol. 44
Auteurs : Ostasevicius Vytautas, Dauksevicius Rolanas
Foreword.- Preface.- Introduction to Microsystems.- Fabrication Technologies of Microsystems.- Overview.- Nickel Surface Micromachining Technology for Fabrication of Microswitches.- UV Lithography for Fabrication of Micromotors.- Common MEMS Actuators.- Parallel Plate Capacitors.- Comb Drives.- Electrostatic Micromotors.- Electrostatic Microswitches.- Theoretical Background of Multiphysical Interactions Common in Microsystems.- Introduction to Coupled-Field Modeling.- Electrostatic Actuation and Pull-in Instability.- Viscous Air Damping.- Vibro-Impact Interactions.- Experimental Testing of Microsystem Dynamics.- Vibration Excitation Methods.- Optical Techniques for Measurement of Vibrations of Microstructures.- Study of Elastic Vibro-Impact Macrosystems and Microsystems.- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact.- Macrosystems.- .- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator.- Numerical Modeling and Analysis of Fluidic-Structural Interaction.- Numerical Modeling and Analysis of Electrostatic-Structural Interaction.- Numerical Modeling and Analysis of Vibro-Impact Interaction.- Numerical Analysis of the Micromotor.- Finite Element Modeling of Micromotor.- Modal Analysis.- Micromotor Control.- Analytical Model of a Micromotor.- Basics of Micromotor Geometry.- Torque Analysis.- Micromotor Design Guidelines.- References.
Date de parution : 01-2013
Ouvrage de 214 p.
15.5x23.5 cm
Date de parution : 11-2010
Ouvrage de 214 p.
15.5x23.5 cm
Thème de Microsystems Dynamics :
Mots-clés :
MEMS; control; dynamical systems; manufacturing; micromotors; microswitches; microsystems; nonlinear dynamics; vibration