Microelectronics to Nanoelectronics Materials, Devices & Manufacturability

Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena.

Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology?s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul?s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry.

Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions?such as Hewlett-Packard?and government laboratories including the U.S. Department of Energy?s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

Scaling and Radiation Effects in Silicon Transistors.Hewlett-Packard’s MEMS Technology: Thermal Inkjet Printing and Beyond. Silicon MEMS Resonators for Timing Applications.Nanoscale Electromechanical Devices Enabled by Nanowire Structures.Silicon Etching and Etch Techniques for NEMs and MEMs.Learning from Biology: Viral-Templated Materials and Devices. Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems. Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications. NEMS-Based Ultra Energy-Efficient Digital ICs: Materials, Device Architectures, Logic Implementation, and Manufacturability.Carbon Nanotube Y-Junctions.Nanoscale Effects in Multiphase Flows and Heat Transfer.Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing.

Dr. Anupama B. Kaul obtained her MS and Ph.D degrees in Materials Science and Engineering from the University of California–Berkeley with minors in Electrical Engineering and Physics. She received her BS degrees with honors in Physics, as well as Engineering Physics. Presently, she is a Program Director at the National Science Foundation in the Engineering Directorate, where she is serving as an IPA from the Jet Propulsion Laboratory (JPL) California Institute of Technology (Caltech). Prior to joining JPL – Caltech, Dr. Kaul held industrial research positions at Motorola Labs and the R&D Division of Hewlett-Packard Company, where she worked on RF micro-electro-mechanical-systems (MEMS) components for wireless applications, and surface micro-machined ink-jet print heads, respectively. Dr. Kaul has given numerous invited and keynote talks on nanotechnology-related topics at international conferences and meetings, and she is active in chairing conferences for the IEEE, MRS, SPIE and NSTI, and other professional societies. Dr. Kaul is a Senior Member of the IEEE and has also been selected to participate in the U.S. Frontiers of Engineering Symposium organized by the National Academy of Engineering.