Beam effects, surface topography, and depth profiling in surface analysis

Written as a tutorial guide for newcomers to the field of surface analysis, this work is the first book ever published to feature photon, electron, and ion beam effects and beam damage to solids during surface and near-surface analysis and depth profiling. This introductory text describes the principles, techniques, and methods vital for efficient surface analysis.
A wealth of practical information is assembled in this single volume, including summary tables, extensive references, and 251 illustrative figures.

Photon Beam Damage at Solid Surfaces, J.H. Thomas, III. Electron Beam Damage at Solid Surfaces, C.G. Pantano, et al. Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling, L.S. Daket, et al. Characterization of Surface Topography, T.V. Vorburger, et al. Depth Profiling Using Sputtering Methods, H.W. Werner, P.R. Boudewijn. Index.